V series applications

From gas measurement and control to gas line commissioning, helping customers get their equipment working well.

SF₆ / N₂ gas mixture filling

When SF₆ is reduced, the mixing ratio has to be accurate. We provide more than an MFC: we help equipment makers get the gas path and the way of use right.

30% SF₆ + 70% N₂, with factory concentration held within ±0.5 percentage points

Power equipment

C₄F₇N ternary gas mixing

C₄F₇NO₂CO₂

C₄F₇N properties are built in: select the gas to measure and control it, and we can help with liquefaction issues.

Select the gas directly from the gas list; accuracy accepted by the customer has been reached

Analytical instruments

Calibration gas blending for SF₆ / C₄F₇N analyzers

SF₆C₄F₇NMulti-channel blending

Blend several calibration concentrations from a few types of standard gas, reducing purchase cost and cylinder storage space.

Fewer standard gas types and cylinders in stock, with flexible calibration concentrations

Electronic materials

Gas supply for quartz fiber drawing

H₂O₂

Stable hydrogen and oxygen supply with little sensitivity to inlet pressure fluctuation, for a steadier drawing flame.

Low sensitivity to inlet pressure fluctuation, a stable flame and less repeated tuning

Environmental monitoring

Inlet gas blending for monitoring-station analyzers

Temperature & pressure compensationMass flow

Temperature changes inside a monitoring station, yet the MFC still controls the true flow and keeps the analyzer supplied steadily.

The amount of gas actually delivered stays accurate when the temperature changes

Leak testing

Micro-leak testing of large volumes and at high pressure

Very small flowLow pressure drop

Low pressure drop and strong pressure resistance suit micro-leak testing of atmospheric-pressure volumes and at high pressure.

Very small leak flows can still be measured at high pressure and in large volumes

Battery materials

Silane supply for silicon-carbon anode materials

SiH₄CVD

Used to control silane supply, with good pressure sensitivity and gas permeation performance; long-term operating conditions are evaluated together.

Experience with silane applications, with long-term operation evaluated alongside the process

Semiconductor equipment

Gas supply for room-temperature direct bonding equipment

ArTwo-channel control

Two-channel argon control, running continuously at a customer site for more than a year in a stable state.

More than a year of stable operation in real semiconductor equipment

University research

Sample gas control for mass spectrometers

Sample controlLaboratory gas path

The amount of gas entering a mass spectrometer is controlled according to the needs of the experiment.

Flow and interface matched to the specific experimental task