Silane supply for silicon-carbon anode materials

Used to control silane supply, with good pressure sensitivity and gas permeation performance; long-term operating conditions are evaluated together.

Experience with silane applications, with long-term operation evaluated alongside the process
SiH₄MFCSilane supply · long-term check

Application need

Making silicon-carbon anode materials requires control of the silane supply, and pressure fluctuation must not noticeably affect the flow.

What we did

A customer uses our controllers to control silane, with good pressure sensitivity and gas permeation performance. We can match the product configuration to the process.

Things to note

Silane tends to crystallize on laminar flow elements and make the measurement drift slowly. This has to be evaluated together in terms of gas path conditions, running time and maintenance schedule, and we work with customers to verify it.

VISLAM flow controller in a customer's silane gas line
VISLAM flow controller and silane supply gas line at a customer site

Tell us your gas, flow and pressure

Our engineers will recommend the full model number and send the matching datasheet.

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