Precision Flow,
Seamless Control
Laminar differential pressure mass flow meters, flow controllers and pressure controllers. The measurement structure is protected by two invention patents, and the products are calibrated by national metrology institutes.
Temperature and pressure change, the flow reading does not
Mass (standard-condition) flow output with temperature and pressure compensation. Once temperature and pressure are in equilibrium, two instruments read the same.
From the core valve to operation on site
Made in-house and flexible to connect, for easier commissioning and use.
Proportional valves matched to your system
Designed and made in-house, with multiple orifice sizes matched to pressure drop, flow and leak-rate requirements, to suit your gas line better.
One model, many signals
One pin can be configured for a voltage or a current signal, so you buy and stock fewer variants.
Fast on-site adjustment
Adjust parameters directly on the LCD touchscreen; no computer needed each time for commissioning or temporary use.
Wiring you can trust
Protection against wiring errors lowers the risk of damage, within the specified range of up to 30 V.
V series products
Choose the series that suits your operating conditions
Standard series
General-purpose gas measurement and control. The most widely applicable base series.
| Flow meter | Controller | |
|---|---|---|
| Range | 0.5 SCCM – 5000 SLPM | 0.5 SCCM – 500 SLPM |
| Accuracy (10 SCCM – 20 SLPM) | ±max(0.6%RD, 0.1%FS) | |
| Gas types | 124See the list → | |
| Working pressure | 0–1.0 MPaG | |
High accuracy series
Metrology, R&D and demanding gas blending. Accuracy tiers are higher than the standard series across the full range.
| Flow meter | Controller | |
|---|---|---|
| Range | 0.5 SCCM – 5000 SLPM | 0.5 SCCM – 500 SLPM |
| Accuracy (10 SCCM – 20 SLPM) | ±max(0.5%RD, 0.1%FS) | |
| Gas types | 124See the list → | |
| Working pressure | 0–1.0 MPaG | |
Low pressure drop series
Pressure-drop-sensitive gas lines. Low pressure drop combined with good pressure resistance.
| Flow meter | Controller | |
|---|---|---|
| Range | 0.5 SCCM – 500 SLPM | 0.5 SCCM – 50 SLPM |
| Accuracy (10 SCCM – 25 SLPM) | ±max(0.6%RD, 0.1%FS) | |
| Gas types | 124See the list → | |
| Working pressure | 0–0.5 MPaG (expandable to 0–1 MPaG) | |
Corrosion resistant series
Corrosive gases. Wetted materials are 316L stainless steel and FFKM.
| Flow meter | Controller | |
|---|---|---|
| Range | 0.5 SCCM – 5000 SLPM | 0.5 SCCM – 500 SLPM |
| Accuracy (10 SCCM – 20 SLPM) | ±max(0.6%RD, 0.1%FS) | |
| Gas types | 137See the list → | |
| Working pressure | 0–1.0 MPaG | |
Pressure controllers
The single-valve version controls positive pressure or back pressure; the dual-valve version can raise and lower pressure and suits closed volumes.
| Range | 1 MPaG (standard) |
|---|---|
| Accuracy | ±0.25%FS |
| Control range | 0.01–100%FS |
| Control response | <100 ms (T63) |
Flow accuracy: These figures apply after flow zeroing, with temperature, pressure and humidity in equilibrium. See the series details and datasheets for the full specifications and conditions.
V series applications
From gas measurement and control to gas line commissioning, helping customers get their equipment working well.
SF₆ / N₂ gas mixture filling
Gas supply for quartz fiber drawing
Micro-leak testing of large volumes and at high pressure
Inlet gas blending for monitoring-station analyzers
Everything can be checked
Patented measurement structure
Two invention patents and three utility models. The proportional valve is developed in-house and under our own control, with a flat-spring design for a long service life.
Metrological calibration and compliance
Calibrated by the National Institute of Metrology (China), the South China National Centre of Metrology and the Shenzhen Academy of Metrology and Quality Inspection; third-party documents for CE (EMC, LVD), RoHS and IP40.
Verification and reference comparison
Comparison with a piston prover and a laminar flow reference standard to check the flow readings.
Open technical documents
Datasheets, the user manual and the free Toolkit software are available to download directly. For selection, contact us and an engineer will help you confirm.
Beyond flow: temperature, pressure and density too
Flow, temperature and pressure of the gas are measured online, and density is calculated from the gas property model. After the basic calibration, the measured gas can be changed through the built-in gas models without recalibrating on the target gas. See the supported gases →
- Three control modes: flow, pressure and dispense
- Powered through USB Type-C or DB9, 4.75–30 VDC
- USB virtual serial port for easy software development and debugging
- Modbus RTU (RS485) and five analog signal types
- Protection against reversed power and signal-line miswiring within 30 V
Free VISLAM.Toolkit: log data and set instrument parameters. Download the tool →
Patents and certificates
Click to enlarge, scroll to read. Documents are shown as issued; the patent and calibration certificates are in Chinese.
Patents5
Compliance and testing4
Metrological calibration3
Drag to rotate and see every detail
VSC02 flow controller, modeled and rendered to real dimensions.
Product documents, in one place
Datasheets, the user manual and the free Toolkit software.
Go to Downloads →Need help choosing? Contact an engineerTell us your gas, flow and pressure
Our engineers will recommend the full model number and send the matching datasheet.
+86-755-23097806