Standard series
Flow meter VS02 · Flow controller VSC02
General-purpose gas measurement and control. The most widely applicable base series.
Specifications compared
The flow meter and flow controller share the same laminar differential pressure measurement platform; the controller adds a proportional valve and control functions.
| Item | Flow meter VS02 | Flow controller VSC02 |
|---|---|---|
| Range | 0.5 SCCM – 5000 SLPM | 0.5 SCCM – 500 SLPM |
| Accuracy (10 SCCM – 20 SLPM) | ±max(0.6%RD, 0.1%FS) | |
| Repeatability (10 SCCM – 20 SLPM) | ±max(0.1%RD, 0.02%FS) | |
| Turndown ratio | 1:1000, 1:10000 optional | |
| Response time | Measurement < 10 ms | Measurement < 10 ms; control as fast as < 100 ms |
| Warm-up | < 1 s to within rated accuracy | |
| Gas types | 124 (including humid air and predefined gas mixtures; no corrosive gases)See the list → | |
| Working pressure | 0–1.0 MPaG | |
| Max. withstand pressure | < 1.2 MPaG | 1.2 MPaG |
| Max. differential pressure | 0.6 MPaD | 1.2 MPaD |
| Operating temperature | −10 to 60 °C (expandable to −20 to 70 °C) | |
| Annual drift | <0.1%FS (in clean, non-corrosive gas) | |
| Power supply | 4.75 – 30 VDC; 2 W | 4.75 – 30 VDC; 0.5 SCCM – 20 SLPM: 5 W, 50 – 500 SLPM: 15 W |
| Power connector | USB Type-C, DB9 male | |
| Digital interface | Modbus RTU (RS485), USB (USB-to-serial) | |
| Analog I/O | 0–20 mA / 4–20 mA / 0–5 VDC / 1–5 VDC / 0–10 VDC (software selectable) | |
| Ingress protection | IP40 | |
| Wetted materials | 304 stainless steel, aluminum, gold, alumina ceramic, glass, epoxy, silicone, silicon | 300-series stainless steel, 400-series stainless steel, aluminum, gold, alumina ceramic, glass, epoxy, silicone, silicon |
| Seal material | FKM standard; EPDM, NBR and others optional | |
Accuracy and repeatability
Tiers follow the nominal full scale of the model, not the current reading. RD: reading; FS: nominal full scale; max: the larger of the two terms. These figures apply after flow zeroing, with temperature, pressure and humidity in equilibrium.
| Range | 0.5 SCCM – 5 SCCM | 10 SCCM – 20 SLPM | 50 SLPM – 5000 SLPM |
|---|---|---|---|
| Accuracy | ±(0.8%RD + 0.2%FS) | ±max(0.6%RD, 0.1%FS) | ±(0.8%RD + 0.2%FS) |
| Repeatability | ±(0.2%RD + 0.02%FS) | ±max(0.1%RD, 0.02%FS) | ±(0.2%RD + 0.02%FS) |
| Range | 0.5 SCCM – 5 SCCM | 10 SCCM – 20 SLPM | 50 SLPM – 500 SLPM |
|---|---|---|---|
| Accuracy | ±(0.8%RD + 0.2%FS) | ±max(0.6%RD, 0.1%FS) | ±(0.8%RD + 0.2%FS) |
| Repeatability | ±(0.2%RD + 0.02%FS) | ±max(0.1%RD, 0.02%FS) | ±(0.2%RD + 0.02%FS) |
Process connections
All ports are female threads.
| Flow Range | Standard Port | Optional Ports | Venting Pressure Drop |
|---|---|---|---|
| 0.5 – 5 SCCM | G1/8 | M5, PT1/8, NPT1/8 | < 6.5 kPaD |
| 10 SCCM – 20 SLPM | G1/8 | PT1/8, NPT1/8 | < 10 kPaD |
| 50 – 100 SLPM | G1/4 | PT1/4, NPT1/4 | < 10 kPaD |
| 250 SLPM | PT1/2 | G1/2, NPT1/2 | < 12 kPaD |
| 500 – 1000 SLPM | PT3/4 | G3/4, NPT3/4 | < 15 kPaD |
| 2000 – 3000 SLPM | PT1 | G1, NPT1 | < 20 kPaD |
| 5000 SLPM | PT2 | G2, NPT2 | < 20 kPaD |
| Flow Range | Standard Port | Optional Ports | Inlet Pressure Range |
|---|---|---|---|
| 0.5 – 100 SCCM | G1/8 | PT1/8, NPT1/8 | 20–1000 kPaG |
| 200 SCCM – 1 SLPM | G1/8 | PT1/8, NPT1/8 | 30–1000 kPaG |
| 3 – 10 SLPM | G1/8 | PT1/8, NPT1/8 | 50–1000 kPaG |
| 20 SLPM | G1/8 | PT1/8, NPT1/8 | 100–1000 kPaG |
| 50 – 100 SLPM | G1/4 | PT1/4, NPT1/4 | 100–1000 kPaG |
| 250 SLPM | PT1/2 | G1/2, NPT1/2 | 300–900 kPaG |
| 500 SLPM | PT3/4 | G3/4, NPT3/4 | 350–650 kPaG |
Venting pressure drop: the pressure difference between inlet and outlet at nominal full-scale flow, with dry air at 20 °C and 0.1 MPaA, the outlet open to atmosphere and the inlet connected to the gas supply. Inlet pressure ranges are given for standard models at nominal full-scale flow with the outlet vented, and can be customized on request.