Fewer standard gas types and cylinders in stock, with flexible calibration concentrations
Application need
Calibrating SF₆ and C₄F₇N concentration analyzers needs several known concentration points. Buying a standard gas for each concentration is costly and takes up cylinder storage space.
The difficulty
Blending several concentration points from a few types of standard gas and a diluent gas needs accurate ratios and consistent, repeatable preparation.
What we did
MFCs control the standard gas and the diluent separately, and the calibration concentration is changed by adjusting the flow ratio. Our experience in measuring and controlling SF₆ and C₄F₇N supports both blending accuracy and repeatability.