Product series
All products are based on the laminar differential pressure principle. Each flow meter (MFM) has a matching flow controller (MFC, model number with a C); pressure controllers (VPC) come in single-valve and dual-valve versions.
Standard series
VS02 / VSC02
General-purpose gas measurement and control. The most widely applicable base series.
- Range0.5 SCCM – 5000 SLPM
- Accuracy±max(0.6%RD, 0.1%FS)
- Gas types124
High accuracy series
VH02 / VHC02
Metrology, R&D and demanding gas blending. Accuracy tiers are higher than the standard series across the full range.
- Range0.5 SCCM – 5000 SLPM
- Accuracy±max(0.5%RD, 0.1%FS)
- Gas types124
Low pressure drop series
VL02 / VLC02
Pressure-drop-sensitive gas lines. Low pressure drop combined with good pressure resistance.
- Range0.5 SCCM – 500 SLPM
- Accuracy±max(0.6%RD, 0.1%FS)
- Gas types124
Corrosion resistant series
VK02 / VKC02
Corrosive gases. Wetted materials are 316L stainless steel and FFKM.
- Range0.5 SCCM – 5000 SLPM
- Accuracy±max(0.6%RD, 0.1%FS)
- Gas types137
Pressure controllers
VPC01 / VPC02
The single-valve version controls positive pressure or back pressure; the dual-valve version can raise and lower pressure and suits closed volumes.
- Pressure range1 MPaG
- Measurement accuracy±0.25%FS
- Control response<100 ms